Diving Deep into TSV Cleaning and Electroplating Processes For Heterogeneous Integration
By Jim Straus and Sally-Ann Henry, ACM Research While heterogeneous integration of multiple components and 2.5D/3D packaging techniques pair perfectly with complex stacking architectures, these technologies elicit high demands on device manufacturing processes. Through-silicon vias (TSVs) are a key enabler, allowing direct chip-to-chip connection through the chip stack without requiring...