Lam Research Introduces Breakthrough Deposition Technique to Enable Next-Generation MEMS for 5G and Beyond
Pulsus™ is the semiconductor industry’s first pulsed laser deposition tool designed for mass production FREMONT, Calif., March 26, 2024 – Lam Research Corp. (Nasdaq: LRCX) today introduced the world’s first production-oriented pulsed laser deposition (PLD) tool to enable next-generation MEMS-based microphones and radio frequency (RF) filters. Lam’s Pulsus™ PLD system delivers aluminum...