Diving Deep into TSV Cleaning and Electroplating Processes For Heterogeneous Integration
Sep 09, 2024 · By ACM Research · 3D In-Depth, Processes and Technology
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3D: The El Dorado of Heterogeneous Integration
From the cloud to edge computing, the quest for ever-greater power efficiency remains researchers’ top priority. From high-end niche to...
CEA-Leti/Intel Collaboration brings 3D Powerhouses to the Advanced 3D Packaging Table
CEA-Leti and Intel recently announced a new collaboration effort on advanced 3D packaging technologies for processors to advance chip design....
Plasma Treatment During Fan-Out Packaging Maximizes Performance and Optimizes Costs
In recent years, there has been an increased focus on fan-out wafer-level packaging (FOWLP) due to the smaller packaging size...
48V Ecosystem and Power Packaging Trends
With each passing year, emerging growth application areas such as Automotive, Cloud Computing, Industrial Automation, and Telecom (5G) Infrastructure are...
Carrier Wafers for Semiconductor and MEMS Manufacturing
As technology rapidly moves forward, the reduction of device and chip size is playing an important role in implementing as...
Temporary Wafer Bonding System Is Based On Electrostatics, Not Adhesives
Temporary wafer bonding is widely employed in semiconductor device fabrication and in semiconductor device packaging applications, particularly now that changes...
Temporary Bonding and Mold Process to Enable Next-Gen FOWLP
Temporary wafer bonding processes were initially developed for enabling three-dimensional (3D) stacked integrated circuits (ICs). For example, dies can be...
A Look Inside The 3D Technology Toolbox For STCO
System-technology co-optimization (STCO) – enabled by 3D integration technologies – is seen as a next ‘knob’ for continuing the scaling...
Addressing the Challenges of Surface Preparation for Advanced Wafer Level Packaging
As the semiconductor industry shifts focus from CMOS scaling to heterogeneous integration, the importance of surface preparation and wafer cleans...
CoolCube™: More than a True 3D VLSI Alternative to Scaling
Almost four years ago, we published an article titled “CoolCube™: A True 3DVLSI Alternative to Scaling” on 3D InCites. It...
Replacing NMP: Are You Ready?
NMP is an abbreviation for N-methyl-2-pyrrolidone (other synonyms are 1-Methyl-2-pyrrolidone and 1-Methyl-2-pyrrolidinone) (Figure 1). NMP has proven itself as an...
The Fundamentals and Early History of Quantum Mechanical Tunneling
The mid-1920’s were the miracle years for quantum mechanics. The “Old Quantum Theory” originating with Niels Bohr, had reached crisis point by the...
The Triumph of Quantum Mechanics at the Heart of Solid-State Data Storage
If all the data sent worldwide each day on the internet were burned on to CDs and these were then piled one... Integrated Solid-state Capacitors Based on Carbon Nanostructure
The constant demand for miniaturization, added functionality and increased performance of electronic devices systematically drives higher integration by adding more... 3D Systems-on-Chip: Clever Circuit Partitioning To Extend Moore’s Law
In recent years, the technology of 3D integration has evolved into an economically interesting road. In particular, the technology is...
The Dual-Gate Thin Film Transistor for 3D Dynamic and Flash Memory
Data is now the world’s most valuable resource. Solid-state storage of data is driving an innovation revolution built upon 50 years...
Lam Research: SABRE 3D
SABRE® 3D is a next-generation electroplating product designed to meet leading-edge production requirements for advanced packaging applications. This product leverages proprietary... Nordson ASYMTEK: Programmable Tilt + Rotate 5-Axis Fluid Dispenser
Nordson ASYMTEK’s programmable Tilt + Rotate 5-Axis Fluid Dispenser dispenses using 5 axes instead of 3. The X and Y... SPTS: Sigma fxP PVD with Multi-Wafer Degas
SPTS’s Sigma® fxP, is a well established PVD system used in advanced packaging applications such as UBM and RDL. It... 