SPP Process Technology Systems Ltd. (SPTS), announced shipments of US$40 million during the first quarter of 2010. SPTS was formed in October 2009 to merge Surface Technology Systems plc (STS) and assets acquired from Aviza Technology, Inc., including the single wafer process equipment subsidiary Aviza Technology Ltd. (ATL) and the Scotts Valley based thermal products business.
Q1 shipments included a broad range of etch, CVD, and PVD single wafer tools, as well as new and refurbished furnaces and thermal product upgrades. In addition to strength in their traditional MEMS and image sensor markets, the TSV and compound semiconductor markets exhibited rapid growth, particularly in light emitting diode (LED) applications. Of particular note was a resurgence of activity in STS brand products, accounting for a significant portion of the Q1 shipments. (More)